Hold checking method and unhold checking method for wafer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10910246
APP PUB NO 20180025928A1
SERIAL NO

15648663

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Disclosed herein is a hold checking method for checking whether or not a wafer is held by an electrostatic chuck in loading the wafer to the electrostatic chuck by operating a transfer unit holding the wafer. The hold checking method includes a connecting step of bringing the wafer held by a transfer pad into contact with the electrostatic chuck to thereby connect the transfer pad through the wafer to the electrostatic chuck, and a hold determining step of supplying electric power from a DC power source through first wiring to the electrostatic chuck after performing the connecting step, and next determining that the wafer is held by the electrostatic chuck when the voltage across a resistor inserted in the first wiring has reached a predetermined voltage value.

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Patent Owner(s)

  • DISCO CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chito, Kenta Tokyo, JP 8 12

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