Gold evaporative sources with reduced contaminants and methods for making the same

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United States of America Patent

PATENT NO 10023939
APP PUB NO 20180029096A1
SERIAL NO

15715892

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Abstract

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A unique sequence of steps is provided to reduce contaminants along one or more surfaces and faces of gold evaporative sources without deleteriously impacting the structure of the gold evaporative sources. Edges are deburred; contaminants are successfully removed therealong; and surface smoothness is substantially retained. The resultant gold evaporative source is suitable for use in evaporative processes as a precursor to gold film deposition without the occurrence or a substantial reduction in the likelihood of spitting by virtue of significantly reduced levels of contaminants, in comparison to gold evaporative sources subject to a standard cleaning protocol.

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Patent Owner(s)

  • PRAXAIR S. T. TECHNOLOGY INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aviles, Ernesto Monroe, US 2 2
Gilman, Paul S Suffern, US 71 1047
Sarkar, Jaydeep Thiells, US 6 5
Stuber, Wendell R Pine Bush, US 2 2

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