Grinding apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10639764
SERIAL NO

15657963

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A grinding apparatus includes a holding table for holding a wafer, a support table for supporting the holding table, a motor for rotating the support table, a frame member supporting the support table for rotation, and at least three support poles for supporting the frame member from the base. Each of the support poles has formed in the inside thereof a through-hole, a supply port which communicates the through-hole and an air supply source with each other, and an exhaust port which exhausts air having flowed through the through-hole toward the support table. Air is supplied into the through-hole to cool the support pole, and the air having flowed through the through-hole is exhausted toward the support table.

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First Claim

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Patent Owner(s)

  • DISCO CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawana, Mamoru Tokyo, JP 2 0

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