METHODS FOR PRODUCING SINGLE CRYSTAL SILICON INGOTS WITH REDUCED SEED END OXYGEN

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United States of America Patent

SERIAL NO

15662844

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Abstract

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Methods for producing single crystal silicon ingots with a reduced oxygen content toward the seed end of the ingot are disclosed. The methods may involve controlling growth conditions during crown formation and, in some embodiments, controlling the rate of crucible rotation during crown rotation to increase the time the crucible is rotated at or below a threshold value during crown growth.

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Patent Owner(s)

Patent OwnerAddress
GLOBALWAFERS CO LTDNO 8 INDUSTRIAL EAST ROAD 2 SCIENCE-BASED INDUSTRIAL PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ji, Jun Hwan Cheonan, KR 6 1
Kim, Byung Chun Cheonan, KR 3 2
Kwon, Doh Hyung Cheonan, KR 1 0
Lee, Hyung Min Cheonan, KR 30 267
Lee, Jong Hak Cheonan, KR 11 601
Lee, Young Jung Cheonan, KR 9 3
Ryu, Jae Woo Chesterfield, US 29 62

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