Shielded probe systems with controlled testing environments

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10281492
APP PUB NO 20180031608A1
SERIAL NO

15725650

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Abstract

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Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting assembly extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting assembly includes an electrically conductive support surface, which is configured to support a substrate that includes the DUT. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting assembly.

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Patent Owner(s)

Patent OwnerAddress
FORMFACTOR INC7005 SOUTHFRONT ROAD LIVERMORE CA 94551

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clauss, Walter Matthias Radeberg, DE 2 3
Schmiedchen, Swen Dresden, DE 2 3
Stoll, Karsten Sohland an der Spree, DE 12 77
Teich, Michael Moritzburg, DE 47 584

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