Inspection method and inspection apparatus

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United States of America Patent

PATENT NO 10698006
APP PUB NO 20180031614A1
SERIAL NO

15548860

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Abstract

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An inspection apparatus includes a tester unit that applies a stimulus signal to a semiconductor apparatus, an MO crystal arranged to face a semiconductor apparatus, a light source that outputs light, an optical scanner that irradiates the MO crystal with light output from light source, a light detector that detects light reflected from the MO crystal arranged to face the semiconductor apparatus D and outputs a detection signal, and a computer that generate phase image data based on a phase difference between a reference signal generated based on a stimulus signal and the detection signal, the phase image data including a phase component indicating the phase difference, and generates an image indicating a path of a current from the phase image data.

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Patent Owner(s)

Patent OwnerAddress
HAMAMATSU PHOTONICS K K1126-1 ICHINO-CHO HIGASHI-KU HAMAMATSU-SHI SHIZUOKA 435-8558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Tomonori Hamamatsu, JP 139 1047
Otaka, Akihiro Hamamatsu, JP 12 27

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