Process for manufacturing a MEMS micromirror device, and associated device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10768408
APP PUB NO 20180031822A1
SERIAL NO

15465019

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Abstract

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A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20041 AGRATE BRIANZA (MILANO)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldo, Lorenzo Bareggio, IT 79 662
Carminati, Roberto Piancogno, IT 65 106
Duqi, Enri Milsno, IT 53 93
Villa, Flavio Francesco Milsno, IT 52 495

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