Processing tool monitoring

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United States of America Patent

PATENT NO 10802941
APP PUB NO 20180032419A1
SERIAL NO

15549927

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A monitoring apparatus may include reception logic operable to receive processing characteristic data generated during the processing of the effluent stream; segregation logic operable to segregate the processing characteristic data into contributing processing characteristic data associated with contributing periods which contribute to a condition of the at least one processing tool and non-contributing processing characteristic data associated with non-contributing periods which fail to contribute to the condition; and fault logic operable to utilise the contributing processing characteristic data and to exclude the non-contributing processing characteristic data when determining a status of the condition.

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Patent Owner(s)

  • EDWARDS LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Giorgi, Vincent Eastbourne, GB 1 0
Mooney, Michael Brighton, GB 26 267

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