Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus

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United States of America Patent

PATENT NO 10770315
APP PUB NO 20180033654A1
SERIAL NO

15550971

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Abstract

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A fall-proof apparatus for cleaning semiconductor devices is provided. The fall-proof apparatus comprises: a nozzle (102) connecting with a carrier (101); a megasonic/ultrasonic device (105) fixing on the carrier (101); and a sensor (104) detecting the distance between the megasonic/ultrasonic device (105) and the carrier (101) to determine whether the megasonic/ultrasonic device (105) is loose and going to fall. The megasonic/ultrasonic device works with the nozzle during a cleaning process. A chamber with the fall-proof apparatus is also provided.

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Patent Owner(s)

Patent OwnerAddress
ACM RESEARCH (SHANGHAI) INCBUILDING 4 NO 1690 CAI LUN ROAD CHINA (SHANGHAI) PILOT FREE TRADE ZONE PUDONG NEW AREA SHANGHAI 201203 201203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fuping Shanghai, CN 45 43
Chu, Zhenming Shanghai, CN 5 1
Jia, Shena Shanghai, CN 19 20
Li, Xuejun Shanghai, CN 57 510
Wang, Hui Shanghai, CN 1115 8921
Wang, Xi Shanghai, CN 356 3114
Wu, Jun Shanghai, CN 507 5138

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