NITRIDE SEMICONDUCTOR TEMPLATE AND METHOD FOR MANUFACTURING SAME

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United States of America Patent

SERIAL NO

15551960

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Abstract

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A nitride semiconductor template includes a Ga2O3 substrate, a buffer layer formed on the Ga2O3 substrate and including AlN as a principal component, a first nitride semiconductor layer formed on the buffer layer and including AlxGa1-xN (0.2yGa1-yN (0.2≦y≦0.55, y

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Patent Owner(s)

Patent OwnerAddress
RIKEN2-1 HIROSAWA WAKO-SHI SAITAMA 351-0198
TAMURA CORPORATION1-19-43 HIGASHI-OIZUMI NERIMA-KU TOKYO 1788511

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HIRAYAMA, Hideki Saitama, JP 90 670
IIZUKA, Kazuyuki Tokyo, JP 33 311
KURAMATA, Akito Tokyo, JP 22 350
MORISHIMA, Yoshikatsu Tokyo, JP 11 147

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