Transfer chamber

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United States of America Patent

PATENT NO 10672632
APP PUB NO 20180040493A1
SERIAL NO

15554135

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter. The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).

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Patent Owner(s)

Patent OwnerAddress
SINFONIA TECHNOLOGY CO LTD1-30 SHIBA-DAIMON 1-CHOME MINATO-KU TOKYO 105-8564

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawai, Toshihiro Tokyo, JP 48 551
Komiya, Munekazu Tokyo, JP 8 43
Shigeta, Takashi Tokyo, JP 26 96
Taniyama, Yasushi Tokyo, JP 28 579

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