DEVICE FOR REMOVING MICROPARTICLES CONTAINED IN WATER AND ULTRAPURE-WATER PROUCTION AND SUPPLY SYSTEM
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United States of America Patent
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Feb 22, 2016
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Feb 23, 2015
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Abstract
In a subsystem or water-feed path located upsteam of a use point in an ultrapure water production/supply process, fine particles having a particle diameter of 50 nm or less, in particular 10 nm or less are highly removed. A device for removing fine particles in water has a membrane filtration device including a microfiltration membrane or an ultrafiltration membrane having a weak cationic functional group. The microfiltration membrane or the ultrafiltration membrane having a weak cationic functional group is preferred to have a polyketone film with the weak cationic functional group. Negatively-charged particles in water are adsorbed by the weak cationic functional group and can thus be removed.
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