Thermal history-based etching

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United States of America Patent

PATENT NO 10155688
APP PUB NO 20180044227A1
SERIAL NO

15794824

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Abstract

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A method for adjusting an etchability of a first borosilicate glass by heating the first borosilicate glass; combining the first borosilicate glass with a second borosilicate glass to form a composite; and etching the composite with an etchant. A material having a protrusive phase and a recessive phase, where the protrusive phase protrudes from the recessive phase to form a plurality of nanoscale surface features, and where the protrusive phase and the recessive phase have the same composition.

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Patent Owner(s)

  • UT-BATTELLE, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Simpson, John T Clinton, US 74 1338

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