Acoustic resonator device with controlled placement of functionalization material

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United States of America Patent

PATENT NO 11444595
APP PUB NO 20180048280A1
SERIAL NO

15334459

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Abstract

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A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

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Patent Owner(s)

  • QORVO BIOTECHNOLOGIES, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Edwards, Thayne Bend, US 2 5
Rivas, Rio Bend, US 68 339
Ryder, Matthew Bend, US 12 63

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