Methods of forming rotary sputtering target

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10697056
APP PUB NO 20180051371A1
SERIAL NO

15558388

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Abstract

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Disclosed is a method for producing rotary sputtering target assemblies that are bonded to a suitable backing support. The bonding between the sputtering target body and the backing support is achieved by controlled heating under a suitable temperature, preferably with the help of conductive layer between the induction heater and internal target body that is inductively heated in a manner that enhances axial and radial gradient heating. A non-adhesive protective wrap can also be placed at the target body such as between the conductive wrap and target body.

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Patent Owner(s)

  • VITAL THIN FILM MATERIALS (GUANGDONG) CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Margadant, Nikolaus Providence, US 3 9
Shin, Jong-Won Providence, US 3 7

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