Acoustic wave sensor

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United States of America Patent

PATENT NO 10684163
APP PUB NO 20180052042A1
SERIAL NO

15679162

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Abstract

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An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGNEUBIBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Reutlingen, DE 163 2622
Dorfmeister, Manuel Vienna, AT 9 12
Schmid, Ulrich Vienna, AT 47 222
Schneider, Michael Vienna, AT 309 2501

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