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Abstract

An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×10¹⁶ to 1.0×10¹⁸ molecules/cm³, an SiH group content of less than 2×10¹⁷ molecules/cm³, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×10⁹ pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm² at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M_{193 nm} when measured using the applied wavelength of 193 nm and a second measured value M_{633 nm} when measured using a measured wavelength of 633 nm. The ratio M_{193 nm}/M_{633 nm} is less than 1.7.

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