POLISHING COMPOSITION AND POLISHING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

15551867

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

To provide a polishing composition which is hard to cause etching or corrosion in a polishing target containing a transition metal having a standard electrode potential of -0.45 V or more and 0.33 V or less even when used for polishing the polishing target. The polishing composition contains abrasives and a metal protecting organic compound. The metal protecting organic compound has an interactive functional group which is a functional group interacting with a polishing target containing a transition metal having a standard electrode potential of −0.45 V or more and 0.33 V or less and an inhibiting functional group which is a functional group inhibiting the approach of the abrasives toward the polishing target.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 452-8502

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
YASUI, AKIHITO Kiyosu-shi, JP 6 39

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation