Importance

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Abstract

The present disclosure relates to a manufacturing method of a transparent electrode, and more particularly, to a manufacturing method of a transparent electrode by using a roll-to-roll type transparent electrode manufacturing apparatus including at least one atomic layer deposition module, the method comprises: performing a first atomic layer deposition process to respectively form first and second protection layers on a first surface of a flexible substrate and on a second surface opposite to the first surface; performing a second atomic layer deposition process to form a first oxide layer on the first protection layer; forming a metal layer on the first oxide layer; and forming a second oxide layer on the metal flim, wherein each of the performing the first atomic layer deposition process and the second atomic layer deposition process includes using the at least one atomic layer deposition module.

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First Claim