OFFLINE VISION ASSIST METHOD AND APPARATUS FOR INTEGRATED CIRCUIT DEVICE VISION ALIGNMENT
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United States of America Patent
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app pub date -
Aug 25, 2017
filing date -
Aug 26, 2016
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Abstract
An offline vision assisted calibration system includes: a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises: a socket plate that comprises a hole grid array; and a top contactor assembly that is mountable in an integrated circuit device handler and comprises: a guide plate, a plurality of fiducials located on a lower side surface of the guide plate, a contact holder plate comprising a top contactor contact array, and a plurality of adjustment actuators configured to move the contact holder plate with respect to the guide plate; and a calibration jig comprising an array of contacts on a bottom side thereof, wherein the calibration jig is configured to be placed in the socket plate such that the contacts engage with the hole grid array of the socket plate.
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