Hermetically sealed MEMS mirror and method of manufacture

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10473920
APP PUB NO 20180059405A1
SERIAL NO

15245805

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Importance

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Abstract

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Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allegato, Giorgio Monza, IT 26 43
Carminati, Roberto Piancogno, IT 65 106
Costantini, Sonia Missaglia Lecco, IT 16 43
Vercesi, Federico Milan, IT 21 17

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