VERTICAL MOSFET

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United States of America Patent

SERIAL NO

15663808

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Abstract

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A vertical MOSFET having a compound semiconductor layer is provided, the vertical MOSFET comprising a gate electrode, a gate insulating film provided between the gate electrode and the compound semiconductor layer, a drift region provided directly in contact with at least a part of the gate insulating film and being a part of the compound semiconductor layer, and a high resistance region provided at least in the drift region, is positioned below at least a part of the gate insulating film, and has a higher resistance value per unit length than that of the drift region.

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Patent Owner(s)

Patent OwnerAddress
FUJI ELECTRIC CO LTD1-1 TANABESHINDEN KAWASAKI-KU KAWASAKI-SHI KANAGAWA 210-9530

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ueno, Katsunori Matsumoto-city, JP 123 2427

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