Importance

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Abstract

A semiconductor device is manufactured in a semiconductor body of a wafer by forming a mask on a surface of the semiconductor body. The mask has a plurality of first mask openings in a transistor cell area and a mask opening design outside the transistor cell area. The mask opening design includes one second mask opening or a plurality of second mask openings encircling the transistor cell area. The plurality of second mask openings are consecutively arranged at lateral distances smaller than a width of the plurality of second mask openings. A plurality of first trenches are formed in the semiconductor body at the first mask openings. One or a plurality of second trenches are formed at the one or plurality of second mask openings. The first trenches and the and one or the plurality of second trenches are filled with a filling material including at least a semiconductor material.

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First Claim