Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method
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United States of America Patent
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Aug 25, 2020
Grant Date -
Mar 8, 2018
app pub date -
Mar 30, 2016
filing date -
Mar 30, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A carrying method of carrying a substrate with a substrate holder, including: holding a part of the substrate located above the substrate holder using holding pads; controlling and driving downward the holding pads holding the substrate so that the substrate is supported on the support surface of the substrate holder, when releasing the hold of an other part of the substrate by a substrate carry-in hand that holds the other part of the substrate located above the substrate holder. Accordingly, the substrate carriage to the substrate holder can be swiftly performed.
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