Apparatus for Processing Long Base Material by Roll-to-Roll Method and Film Forming Apparatus Using the Same
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United States of America Patent
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Issued Date -
Mar 8, 2018
app pub date -
Aug 23, 2017
filing date -
Aug 23, 2016
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Abstract
A treatment apparatus includes two can rolls provided on a transfer path through which a long resin film is transferred in a roll-to-roll manner in a vacuum chamber; and surface treatment means facing an outer circumference of each of the can rolls to treat a surface of the long resin film cooled by being wound around the outer circumference. The downstream can roll is provided with upper and lower two sets of feeding and sending systems, and one surface of the long resin film in contact with the outer circumference of the downstream can roll at a time when the long resin film travels through the lower one of the two sets of feeding and sending systems is opposite to the other surface of the resin film in contact with the outer circumference of the downstream can roll at a time when the resin film travels through the upper one.
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