DEPOSITION SUBSTANCE MONITORING DEVICE AND VACUUM PUMP
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United States of America Patent
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Sep 3, 2017
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Sep 6, 2016
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Abstract
A deposition substance monitoring device of a vacuum pump for rotatably driving a rotor by a motor to exhaust gas, comprises: a state determination section configured to determine whether or not the vacuum pump is in a predetermined exhaust state; and a deposition amount determination section configured to receive a deposition amount indicator for an amount of a deposition substance in the pump to determine as excessive deposition when the deposition amount indicator in the predetermined exhaust state is equal to or greater than an acceptable deposition threshold.
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