Importance

Loading Importance Indicators...

Abstract

A displacement measuring device according to the present invention includes a diffraction grating that receives light from a light source, the first diffraction grating including a plurality of grating pattern regions respectively having prescribed diffraction grating patterns, grating pitches of the plurality of grating pattern regions being equal to one another, the plurality of grating pattern regions being arranged in a direction that is orthogonal to a direction in which the prescribed diffraction grating patterns extend; a second diffraction grating that produces interference light upon receiving diffracted light rays emitted from the first diffraction grating; and a light detector that receives the interference light emitted from the second diffraction grating, the light detector including a plurality of photodetectors, the plurality of photodetectors being arranged along a first direction that is orthogonal to a direction in which interference fringes created by the interference light extend.

Loading the Abstract Image...

First Claim