Speed enhancement of chromatic confocal metrology

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United States of America Patent

PATENT NO 10317344
APP PUB NO 20180067058A1
SERIAL NO

15690969

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Abstract

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Systems and methods for height measurements, such as those for bumps, pillars, or film thickness, can use chromatic confocal techniques. The system can include a white light source that emits white light and lenses that vary a focal distance of each wavelength of the white light from the white light source. Each of the wavelengths of the white light focuses at a different distance from the lenses. A sensor body has multiple sensors that are disposed in the sensor body in multiple rows and columns. Each of the rows and the columns has at least two of the sensors.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horn, Paul Milpitas, US 7 34

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