Substrate cleaning device and substrate processing apparatus including the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10331049
APP PUB NO 20180067407A1
SERIAL NO

15691929

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate cleaning device includes a cleaning brush having a circular upper end surface, and cleans a lower surface of a substrate by bringing the upper end surface of the cleaning brush into contact with the lower surface of the substrate rotated by a spin chuck. A space forming member is provided for cleaning of the cleaning brush. The space forming member has a lower end surface. Further, the space forming member has a circular opening in a lower end surface and forms an inner space. A cleaning liquid is supplied to the inner space of the space forming member with the circular opening closed by the upper end surface of the cleaning brush, whereby the cleaning liquid is allowed to flow out from the inner space through the circular opening and a gap between the upper end surface of the cleaning brush and the lower end surface of the space forming member.

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Patent Owner(s)

  • SCREEN HOLDINGS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Momma, Toru Kyoto, JP 14 30
Murachi, Hiromi Kyoto, JP 4 4
Nishiyama, Koji Kyoto, JP 76 477
Sagae, Chikara Kyoto, JP 7 10
Yoshida, Ryuichi Kyoto, JP 68 597

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