Method and apparatus for inspection and metrology

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United States of America Patent

PATENT NO 11170072
APP PUB NO 20180067900A1
SERIAL NO

15558186

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Abstract

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A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.

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Patent Owner(s)

  • ASML NETHERANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ignatova, Velislava Eindhoven, NL 2 15
Jensen, Erik Veldhoven, NL 39 240
Kubis, Michael Meerbusch, DE 32 858
Mos, Everhardus Cornelis Best, NL 79 733
Simons, Hubertus Johannes Gertrudus Venlo, NL 25 341
Ten, Berge Peter Eindhoven, NL 28 112
Wallerbos, Erik Johannes Maria Helmond, NL 15 33
Wildenberg, Jochem Sebastiaan Aarle-Rixtel, NL 32 113

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