Electrostatic chuck device including a heating member

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United States of America Patent

PATENT NO 10629466
SERIAL NO

15558039

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided is an electrostatic chuck device which includes: an electrostatic chuck section having one main surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a first adhesion layer which contains spacers and a silicone adhesive and in which a layer thickness D is in a range of 3 to 25 μm and a ratio (ϕS/D) between the layer thickness D and an average particle diameter ϕS of the spacers is in a range of 0.1 to 1.0; a plurality of heating members bonded to the surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having a gap with respect to one another by the first adhesion layer; a second adhesion layer which contains a silicone adhesive; and a base section having a function of cooling the electrostatic chuck section.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO OSAKA CEMENT CO LTD1-9-2 HIGASHI-SHIMBASHI MINATO-KU TOKYO 105-8641

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Tomomi Tokyo, JP 21 311
Miura, Yukio Tokyo, JP 51 835

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