Laser processing method and laser processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10796959
APP PUB NO 20180068897A1
SERIAL NO

15808211

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Abstract

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A laser beam machining method and a laser beam machining device capable of cutting a work without producing a fusing and a cracking out of a predetermined cutting line on the surface of the work, wherein at pulse laser beam is radiated on the predetermined cut line on the surface of the work under the conditions causing a multiple photon absorption and with a condensed point aligned to the inside of the work, and a modified area is formed inside the work along the predetermined determined cut line by moving the condensed point along the predetermined cut line, whereby the work can be cut with a rather small force by cracking the work along the predetermined cut line starting from the modified area and, because the pulse laser beam radiated is not almost absorbed onto the surface of the work, the surface is not fused even if the modified area is formed.

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Patent Owner(s)

  • HAMAMATSU PHOTONICS K.K.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukumitsu, Kenshi Hamamatsu, JP 86 5524
Fukuyo, Fumitsugu Hamamatsu, JP 73 4492
Uchiyama, Naoki Hamamatsu, JP 147 11833
Wakuda, Toshimitsu Hamamatsu, JP 27 2802

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