Vaporization supply apparatus

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United States of America Patent

PATENT NO 10646844
APP PUB NO 20180071702A1
SERIAL NO

15565696

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Abstract

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A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.

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Patent Owner(s)

  • FUJIKIN INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hidaka, Atsushi Osaka, JP 31 330
Hirao, Keiji Osaka, JP 47 601
Hirata, Kaoru Osaka, JP 69 820
Ikeda, Nobukazu Osaka, JP 232 4012
Nagase, Masaaki Osaka, JP 84 982
Nakatani, Takatoshi Osaka, JP 13 16
Nishino, Kouji Osaka, JP 165 2271
Sugita, Katsuyuki Osaka, JP 54 342
Yamashita, Satoru Osaka, JP 17 334

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