DETACHING APPARATUS AND DETACHING METHOD
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United States of America Patent
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app pub date -
Aug 14, 2017
filing date -
Sep 13, 2016
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Abstract
A first movable body is provided movably in a separation direction and a first engaging member is provided for each suction unit. When the first movable body is moved in the separation direction, the plurality of first engaging members are respectively engaged with the first movable body in the same sequence as an array sequence of the suction units. Thereafter, the suction units are moved in the separation direction together with the first movable body.
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