Micromechanical component and production method for a micromechanical component
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United States of America Patent
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Apr 2, 2019
Grant Date -
Mar 15, 2018
app pub date -
Sep 12, 2017
filing date -
Sep 13, 2016
priority date (Note) -
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Abstract
A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described.
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