Tunable ground planes in plasma chambers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10774423
APP PUB NO 20160145742A1
SERIAL NO

14552273

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus and method are provided for controlling the intensity and distribution of a plasma discharge in a plasma chamber. In one embodiment, a shaped electrode is embedded in a substrate support to provide an electric field with radial and axial components inside the chamber. In another embodiment, the face plate electrode of the showerhead assembly is divided into zones by isolators, enabling different voltages to be applied to the different zones. Additionally, one or more electrodes may be embedded in the chamber side walls.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ayoub, Mohamad Los Gatos, US 15 1001
Bansal, Amit Milpitas, US 35 272
Du, Bois Dale R Los Gatos, US 52 2887
Fodor, Mark A Los Gatos, US 20 1453
Janakiraman, Karthik San Jose, US 109 5126
Juco, Eller Y San Jose, US 17 164
M'Saad, Hichem Santa Clara, US 125 12465
Nowak, Thomas Cupertino, US 94 8571
Rocha-Alvarez, Juan Carlos San Carlos, US 214 8972
Sivaramakrishnan, Visweswaren Cupertino, US 111 4583

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