Method for capturing dynamic vibrations of a roughness sensor, method for measuring a roughness of a workpiece surface, computer program product and measuring device configured to carry out the methods

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United States of America Patent

PATENT NO 10837752
APP PUB NO 20180073853A1
SERIAL NO

15816921

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Abstract

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A method for capturing dynamic vibrations of a roughness sensor of a roughness measuring apparatus is provided. The movement of the roughness sensor relative to the roughness measuring apparatus and/or relative to a surface of a workpiece is captured by a measuring system in the frequency range below 100 Hz with a data capturing rate of greater than 100 Hz. The captured data of the relative movement are made available for further data processing in and/or stored. Moreover, a method for measuring the roughness of a workpiece surface is provided, in which the method for capturing the dynamic vibrations of a roughness sensor is used. In addition, a computer program product for controlling a roughness sensor of a roughness measuring apparatus in accordance with one of the methods is provided, and a roughness measuring device that is configured to carry out one of the methods.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH73447 OBERKOCHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mayinger, Philipp Aalen, DE 10 26

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