Electromigration monitor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10794948
APP PUB NO 20180074110A1
SERIAL NO

15805377

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An EM testing method includes forcing electrical current through EM monitor wiring arranged in close proximity to the perimeter of the TSV and measuring an electrical resistance drop across the EM monitor wiring. The method may further include determining if an electrical short exists between the EM monitor wiring and the TSV from the measured electrical resistance. The method may further include determining if an early electrical open or resistance increase exists within the EM monitoring wiring due to TSV induced proximity effect.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fen Williston, US 115 816
Farooq, Mukta G Hopewell Junction, US 212 3727
Griesemer, John A Salt Point, US 11 108
Kothandaraman, Chandrasekaran Hopewell Junction, US 4 15
Safran, John M Wappingers Falls, US 29 356
Sullivan, Timothy D Underhill, US 138 1740
Wang, Ping-Chuan Hopewell Junction, US 190 2002
Zhang, Lijuan Beacon, US 63 312

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