COMPOUND, RESIST COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN USING IT

Number of patents in Portfolio can not be more than 2000

United States of America Patent

SERIAL NO

15560059

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The resist composition of the present invention contains one or more selected from compounds represented by specific formulae and resins obtained using these as monomers.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INC5-2 MARUNOUCHI 2-CHOME CHIYODA-KU TOKYO 1008324

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ECHIGO, Masatoshi Tokyo, JP 132 598
SATO, Takashi Kanagawa, JP 951 9280
SHIMIZU, Youko Kanagawa, JP 5 20
TOIDA, Takumi Kanagawa, JP 21 58

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation