Charged particle beam device for moving an aperture having plurality of openings and sample observation method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10636621
APP PUB NO 20180076004A1
SERIAL NO

15560286

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).

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Patent Owner(s)

  • HITACHI HIGH-TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dobashi, Takashi Tokyo, JP 8 14
Hanawa, Akinari Tokyo, JP 1 2
Kikuchi, Hideki Tokyo, JP 22 110
Tamaki, Hirokazu Tokyo, JP 13 19
Taniguchi, Yoshifumi Tokyo, JP 28 253
Watanabe, Keitaro Tokyo, JP 7 44
Yaguchi, Toshie Tokyo, JP 20 187

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