Textured skin for chamber components

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United States of America Patent

PATENT NO 10872749
APP PUB NO 20180076010A1
SERIAL NO

15659617

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A chamber component for a processing chamber is disclosed herein. In one embodiment, a chamber component for a processing chamber has a base component body. The base component body has an exterior surface configured to face a processing environment of the processing chamber. A textured skin is conformable to the exterior surface. The textured skin has a first side configured to be disposed against the exterior surface and a second side facing away from the first side. The second side has a plurality of engineered features configured to enhance adhesion of material deposited on the textured skin during use of the processing chamber.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baduvamanda, Cariappa Achappa Bangalore, IN 7 20
Sheelavant, Gangadhar Karnataka, IN 13 42
Vaidya, Kaushik Bangalore, IN 14 920
Vasantha, Bopanna Ichettira Bangalore, IN 7 17

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