Grinding wheel and grinding apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10639761
SERIAL NO

15708277

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A grinding wheel for grinding a wafer held on a holding table includes: a first circular annular plate mounted to a mount of a grinding apparatus; a tubular body extending downward from an outer circumference of the first circular annular plate; a second circular annular plate connected to a lower end of the tubular body; a plurality of grindstones arranged in an annular pattern on a lower surface of the second circular annular plate; an annular ultrasonic oscillation section disposed on an upper surface of the second circular annular plate so as to surround an opening; and an ultrasonic reception section that receives an ultrasonic vibration transmitted from the ultrasonic oscillation section to the grindstones.

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Patent Owner(s)

  • DISCO CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Qiu, Xiaoming Tokyo, JP 15 85

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