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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
JSR CORPORATION	9-2 HIGASHI-SHINBASHI 1-CHOME MINATO-KU TOKYO 105-8640

International Classification(s)

• B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....
• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
• C09G:POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH; S....
• C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HAYAMA, Takahiro	Minato-ku, JP	16	50
IIDA, Masashi	Minato-ku, JP	15	103
KAMEI, Yasutaka	Minato-ku, JP	10	19
KAMO, Satoshi	Minato-ku, JP	19	69
MITSUBOSHI, Ran	Minato-ku, JP	6	60
MITSUMOTO, Kiyotaka	Minato-ku, JP	5	13
NISHIGUCHI, Naoki	Minato-ku, JP	89	763

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Sep 29, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 29, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2018/0086,943

TREATMENT COMPOSITION FOR CHEMICAL MECHANICAL POLISHING, CHEMICAL MECHANICAL POLISHING METHOD, AND CLEANING METHOD

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