Laser uniformly machining apparatus and method

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United States of America Patent

PATENT NO 10705346
APP PUB NO 20180101015A1
SERIAL NO

15410311

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Abstract

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A laser uniformly machining apparatus and method thereof are provided. The apparatus includes a laser unit, a shaping element, a collimating element, a scaling element and a focusing element. The laser unit provides a laser beam for machining. The shaping element shapes the laser beam into an annular beam. The collimating element modifies the direction of the annular beam in accordance with the direction of an optical axis to turn the annular beam into a collimated annular beam. The scaling element adjusts the collimated annular beam in accordance with a scaling ratio to produce a scaled annular beam. The focusing element focuses the scaled annular beam. The scaled annular beam is produced by the scaling element to form a focused beam having a uniformly distribution of light intensity in the direction of the optical axis.

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Patent Owner(s)

  • (6) INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Pin-Hao Hsinchu, TW 11 23
Lee, Min-Kai Hsinchu, TW 16 79
Lin, Mao-Chi Hsinchu, TW 4 4
Lin, Yu-Chung Hsinchu, TW 30 73

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