Importance

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Abstract

Methods and systems for forming cracks as masks for the fabrication of micro-metal mesh are disclosed, including depositing a composite film onto a substrate wherein the composite film comprises a brittle layer, a brittle layer atop a mediate layer, or a brittle layer atop a sacrificial layer; generating a tensile stress in the substrate and/or the composite film in order to form micro-cracks in the brittle layer; tuning widths of the micro-cracks; transferring pattern of the micro-cracks onto the sacrificial layer; depositing a conductive material onto the brittle layer and the area of the substrate or mediate layer exposed by the pattern of the micro-cracks; and performing a lift-off of the brittle layer and if present the sacrificial layer from the substrate or mediate layer, resulting in the micro-metal mesh atop the substrate or mediate layer. Other embodiments are described and claimed.

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First Claim