TEMPLATE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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United States of America Patent
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Dec 21, 2017
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Feb 24, 2015
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Abstract
According to one embodiment, a template forming method is provided. In the template forming method, a template pattern is formed on a first surface of a substrate. A high liquid repellent property portion is formed in a region different from the template pattern on a side of the first surface of the substrate. The high liquid repellent property portion has a higher contacting angle with respect to a resist than a portion without the high liquid repellent property portion formed therein.
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