COPPER PROCESS DEVICE WITH EXPLOSION-PROOF FUNCTION AND COPPER PROCESS EXPLOSION-PROOF METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
May 12, 2016
filing date -
Mar 18, 2016
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A copper process device with an explosion-proof function and a copper process explosion-proof method, the copper process device including a reaction chamber, a container provided below the reaction chamber for containing a solution for etching, a liquid inlet tube, a reflux tube, a temperature control unit, an automatic control unit and a pump on the liquid inlet tube. The reaction chamber is provided with a spray component for spraying the solution to a substrate therein, the liquid inlet tube is used for deliver the solution from the container to the spray component. The temperature control unit includes a temperature sensor for detecting a temperature of the solution within the container. The automatic control unit is electrically connected with the temperature control unit, and controls the pump to stop working when the temperature of the solution in the container is higher than a predetermined temperature range.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully