SPIRAL SPRING AND METHOD FOR ITS MANUFACTURING
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United States of America Patent
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Jan 3, 2018
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Jul 3, 2015
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Abstract
A spiral spring and a method of manufacturing the spiral spring are disclosed. The spiral spring includes at least one winding, which includes a core made of a silicon material. The core comprises two long, parallel, straight sides, and two short, parallel, straight sides. At least the opposite long sides of the core are covered by a SiO2 layer. In the method, the at least one winding is etched out of the silicon material such that the core of the at least one winding of the spiral spring is formed and includes two long, parallel, straight sides and two short, parallel, straight sides.
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