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United States of America Patent

SERIAL NO

15568348

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Importance

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Abstract

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The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED DYNAMICS ENGINEERING GMBH65479 RAUNHEIM

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BIRKNER, Andreas Jena, DE 16 152
EVERS, Arndt Oestrich-Winkel, DE 9 35
HARTGERS, Han Mainz, DE 4 5
VAN, LOON Guido Raunheim, DE 1 1
WEISKE, Ingo Frankfurt am Main, DE 2 2

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