Method using silicon-containing underlayers

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United States of America Patent

PATENT NO 11506979
APP PUB NO 20180164686A1
SERIAL NO

15834157

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Abstract

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Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-containing moiety is pendent to the polymer backbone, and one or more condensable silicon monomers are provided.

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cameron, James F Brookline, US 107 1054
Coley, Suzanne M Mansfield, US 30 151
Cui, Li Westborough, US 33 35
Cutler, Charlotte A Hopkinton, US 8 13
LaBeaume, Paul J Auburn, US 36 185
Williams, William Ipswich, US 32 521
Yamada, Shintaro Shrewsbury, US 87 468

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